Specific Process Knowledge/Lithography/Descum: Difference between revisions

@@ Line 78: / Line 78: @@
 '''recipe 2'''
+{| {{table}}
+| align="center" |
+{| border="1" cellspacing="1" cellpadding="2"  align="center"
+|- style="background:LightGrey"
+|'''Ashing time (min)'''|| 1	||2	||3	||4	||5	||6	||7	||8	||10	||12	||15	||20
+|-
+|'''Etched Thickness (nm)'''||8,1	||9,4	||16,8	||55,2	||44,0	||47,5	||42,5	||55,1416	||85,3	||122,4	||184,8	||305,9
+|-
+|'''Initial temperature (°C)'''||22	||21	||21	||22	||22	||22	||21	||21	||20	||21	||21	||22
+|-
+|}
+|}