Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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*Only authorized users are allowed to use this machine. You require at least 4 training sessions to be authorized. | *Only authorized users are allowed to use this machine. You require at least 4 training sessions to be authorized. | ||
*No unauthorized users are allowed into the e-beam room E-2 unless they are accompanied with a member of DTU | *No unauthorized users are allowed into the e-beam room E-2 unless they are accompanied with a member of DTU Nanolab staff. | ||
*In E-2, all users must keep within the area between the front side of the machine and the table with the pre-aligner setup. Only JEOL staff or DTU | *In E-2, all users must keep within the area between the front side of the machine and the table with the pre-aligner setup. Only JEOL staff or DTU Nanolab staff may access the backside of the machine. | ||
*No users, not even authorised users, are allowed to load a substrate into the autoloader (robot loader). | *No users, not even authorised users, are allowed to load a substrate into the autoloader (robot loader). | ||
*After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader. | *After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader. | ||
*If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU | *If you are prohibited to unmount your substrates before another user requires the cassette, you must accept that either the next user or DTU Nanolab personel unmount your substrates. | ||