Specific Process Knowledge/Thin film deposition/Deposition of Zinc: Difference between revisions
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When we asked other labs about Zn evaporation, they mostly said to try to avoid it and perhaps to try to cool the substrate. An employee at the UCSB Nanofabrication Facility had tried thermal evaporation of Zn and says that their chamber now has status as Zn contaminated, but they have had no user complaints and it is now a long time since they did the deposition. Their chamber is mostly used for III-V materials. They used wires of Zn rather than pellets. | When we asked other labs about Zn evaporation, they mostly said to try to avoid it and perhaps to try to cool the substrate. An employee at the UCSB Nanofabrication Facility had tried thermal evaporation of Zn and says that their chamber now has status as Zn contaminated, but they have had no user complaints and it is now a long time since they did the deposition. Their chamber is mostly used for III-V materials. They used wires of Zn rather than pellets. | ||
More information can be found on the O-drive of the Thin film group under PVD/Thermal evaporator (for | More information can be found on the O-drive of the Thin film group under PVD/Thermal evaporator (for Nanolab staff only). | ||
===Further lessons based on work by Chanju Kim=== | ===Further lessons based on work by Chanju Kim=== | ||