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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/NewProcessD: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
Line 23: Line 23:
| Pegasus/jmli
| Pegasus/jmli
| 20 minute TDESC clean
| 20 minute TDESC clean
| danchip/jml/showerhead/prD/New Process D, 75 cycles or 5:00 minutes  
| nanolab/jml/showerhead/prD/New Process D, 75 cycles or 5:00 minutes  
| S004743
| S004743
! New showerhead  
! New showerhead  
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