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Specific Process Knowledge/Characterization/SEM Tabletop 1: Difference between revisions

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The SEM is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.
The SEM is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.


The SEM Tabletop 1 was installed at Danchip in January 2017.  
The SEM Tabletop 1 was installed at DTU Nanolab in January 2017.