Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions

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===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @danchip===
===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @nanolab===


Recipe used: Ti etch
Recipe used: Ti etch
[[image:TiO2_etch_Evgeniy2.jpg|400px]]
[[image:TiO2_etch_Evgeniy2.jpg|400px]]

Revision as of 20:42, 25 November 2019

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Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin @nanolab

Recipe used: Ti etch

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