Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
This is a standard positive resist from ZEON. The resist is very expensive; DTU | This is a standard positive resist from ZEON. The resist is very expensive; DTU Nanolab has thus stopped buying this resist. | ||
Use CSAR instead. | Use CSAR instead. | ||
Contact lithography@ | Contact lithography@nanolab.dtu.dk if you wish to use this resist. | ||
== Spin Curves == | == Spin Curves == | ||
| Line 19: | Line 19: | ||
|- | |- | ||
|-style="background:Black; color:White" | |-style="background:Black; color:White" | ||
!colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 23-04-2014. Resist was mixed 13-01-2014, i.e. | !colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 23-04-2014. Resist was mixed 13-01-2014, i.e. approximately 3 months old. | ||
|- | |- | ||
| Line 64: | Line 64: | ||
|- | |- | ||
|-style="background:red; color:White" | |-style="background:red; color:White" | ||
!colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. | !colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. approximately 6 days old. | ||
|- | |- | ||
| Line 124: | Line 124: | ||
|- | |- | ||
|-style="background:green; color:White" | |-style="background:green; color:White" | ||
!colspan="7"|ZEON ZEP520A1:2 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. | !colspan="7"|ZEON ZEP520A1:2 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. approximately 6 days old. | ||
|- | |- | ||