Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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==Process information== | ==Process information== | ||
The spinning process will be performed by the customer together with the Photolith group of | The spinning process will be performed by the customer together with the Photolith group of Nanolab. In case you would like to do DUV lithography please contact Lithography team, who will consult you and run your wafers together with you. | ||
Information about resist can be found here: | Information about resist can be found here: | ||