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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVLithography click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/UVLithography click here]'''


[[Image:UVLithography.jpg|320x320px|right|frame|]]
[[Image:UVLithography.jpg|320x320px|right|frame|]]


UV Lithography uses ultraviolet light to transfer a pattern from a mask to a wafer coated with photoresist.  The photoresist film is spin coated on the wafers and the pattern is transferred to the wafer by using a mask aligner. DTU Danchip houses a number of automatic or semi-automatic coaters and mask aligners.
UV Lithography uses ultraviolet light to transfer a pattern from a mask to a wafer coated with photoresist.  The photoresist film is spin coated on the wafers and the pattern is transferred to the wafer by using a mask aligner. DTU Nanolab houses a number of automatic or semi-automatic coaters and mask aligners.


= Getting started =
= Getting started =
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