Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions

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	PolySilicon can be deposited in several ~~Danchip~~ tools. It can be sputtered, e-beam evaporated or be deposited in the PolySilicon furnaces. In the chart below you can compare the different deposition methods:		PolySilicon can be deposited in several Nanolab tools. It can be sputtered, e-beam evaporated or be deposited in the PolySilicon furnaces. In the chart below you can compare the different deposition methods: