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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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'''*'''  ''For thicknesses above 600 nm write to metal@danchip.dtu.dk to ensure that there will be enough material in the machine.''
'''*'''  ''For thicknesses above 600 nm write to metal@nanolab.dtu.dk to ensure that there will be enough material in the machine.''


'''**'''  ''For thicknesses above 200 nm write to metal@danchip.dtu.dk to ensure that there will be enough material in the machine.''
'''**'''  ''For thicknesses above 200 nm write to metal@nanolab.dtu.dk to ensure that there will be enough material in the machine.''


== Studies of Au deposition processes in the Wordentec==
== Studies of Au deposition processes in the Wordentec==
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''NOTE: After depositing 10 layers of 10nm each, one on top of each other, the roughness increased to 0.8nm RMS''
''NOTE: After depositing 10 layers of 10nm each, one on top of each other, the roughness increased to 0.8nm RMS''


Work done by Johneph Sukham (@ DTU Fotonik) and Radu Malureanu (@ DTU Fotonik and DTU Danchip) in 2016-2017.
Work done by Johneph Sukham (@ DTU Fotonik) and Radu Malureanu (@ DTU Fotonik and DTU Nanolab) in 2016-2017.