Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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'''Feedback to this page''': '''[mailto:Characterization@ | '''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/Topographic_measurement&action=edit click here]''' | ||
Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of the substrate you can get a topographic image of the substrate. | Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of the substrate you can get a topographic image of the substrate. | ||
At | At DTU Nanolab we have five systems for topographic measurements: | ||
*Dektak stylus profilers (Dektak XTA, Dektak 3ST and Dektak 8) - ''Profiler for measuring micro structures'' | *Dektak stylus profilers (Dektak XTA, Dektak 3ST and Dektak 8) - ''Profiler for measuring micro structures'' | ||
*Optical Profiler (Sensofar) - ''3D Profiler for measuring micro structures'' | *Optical Profiler (Sensofar) - ''3D Profiler for measuring micro structures'' | ||