Specific Process Knowledge/Wafer cleaning/IMEC: Difference between revisions
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*Clean tank (Cleanroom D-3, the 'Optional Bath' inside Wet Bench 05: Al etch) | *Clean tank (Cleanroom D-3, the 'Optional Bath' inside Wet Bench 05: Al etch) | ||
*Mix your IMEC solution in dedicated bottle (IMEC) inside a fume hood | *Mix your IMEC solution in dedicated bottle (IMEC) inside a fume hood | ||
*Ask a | *Ask a Nanolab employee to help you filling the solution into the 'Optional Bath' tank! | ||
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