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Specific Process Knowledge/Etch/Etching of Silicon Nitride: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Silicon_Nitride click here]'''
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== Comparing silicon nitride etch methods at Danchip ==
== Comparing silicon nitride etch methods at DTU Nanolab ==


There are a broad varity of silicon nitride etch methods at Danchip. The methodes are compared here to make it easier for you to compare and choose the one that suits your needs.  
There are a broad variety of silicon nitride etch methods at DTU Nanolab. The methods are compared here to make it easier for you to compare and choose the one that suits your needs.  




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