Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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== Scanning electron microscopy in the cleanroom at DTU Nanolab== | == Scanning electron microscopy in the cleanroom at DTU Nanolab== | ||
The number of electron microscopes at DTU Nanolab is large. | The number of electron microscopes at DTU Nanolab is large. The five SEMs in building 346 cover a wide range of needs both in the cleanroom and outside: From fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to ultra high resolution images on any type of sample intended for publication. | ||
* The SEM Supra 1 is located in the basement outside the cleanroom. It is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on the SEMs in the cleanroom. | * The SEM Supra 1 is located in the basement outside the cleanroom. It is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on the SEMs in the cleanroom. | ||
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The SEM Tabletop 1 is manufactured by Hitachi. | The SEM Tabletop 1 is manufactured by Hitachi. | ||
== Common challenges in scanning electron microscopy == | == Common challenges in scanning electron microscopy == | ||