Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
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* Resists | * Resists | ||
* Al,(Cr) as masking materials | * Al,(Cr) as masking materials | ||
| style="background:lightgrey; color:black" colspan=" | | style="background:lightgrey; color:black" colspan="4"| | ||
* Silicon | * Silicon | ||
* Fused silica | * Fused silica | ||