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Specific Process Knowledge/Etch/III-V ICP: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP click here]'''


[[Image:III-VICP.jpg |300x300px|thumb|The SPTS III/V ICP in the Danchip cleanroom B-1]]
[[Image:III-VICP.jpg |300x300px|thumb|The SPTS III/V ICP in the STU Nanolab cleanroom B-1]]


== The III-V ICP ==
== The III-V ICP ==
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'''The user manual, user APV and contact information can be found in LabManager:'''
'''The user manual, user APV and contact information can be found in LabManager:'''


Equipment info in [http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=268| LabManager]
Equipment info in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=268| LabManager]


==Process information==
==Process information==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP"