Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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== The ICP Metal Etcher == | == The ICP Metal Etcher == | ||
[[Image:ICP-Metal-Etcher.jpg |300x300px|thumb|The SPTS ICP Metal Etcher in the | [[Image:ICP-Metal-Etcher.jpg |300x300px|thumb|The SPTS ICP Metal Etcher in the DTU Nanolab cleanroom B-1]] | ||
Name: PRO ICP <br> | Name: PRO ICP <br> | ||
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'''The user manual, user APV and contact information can be found in LabManager:''' | '''The user manual, user APV and contact information can be found in LabManager:''' | ||
Equipment info in [http://labmanager. | Equipment info in [http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=266 LabManager] | ||
==Process information== | ==Process information== | ||