Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Speed vs. design:''' | '''Speed vs. design:''' | ||
The maskless aligner exposes the design in north-south oriented stripes (perpendicular to the flat). The stripes all have the same length, set by the height of the design, and only completely empty stripes are skipped. The writing speed may thus be affected by the layout of the design. | |||
Design case: 5 100µm wide, 40mm long lines, spaced 10mm apart (40x40mm<sup>2</sup>) | Design case: 5 100µm wide, 40mm long lines, spaced 10mm apart (40x40mm<sup>2</sup>) | ||