Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions
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''Message: "Standby"'' | ''Message: "Standby"'' | ||
When the furnace is not in use, and when a recipe is selected, | This will be the active step. | ||
When the furnace is not in use, and when a recipe is selected, | |||
If a recipe is aborted, it will jump to the STANDBY step. | If a recipe is aborted, it will also jump to the STANDBY step. | ||
In the standby step, the furnace is closed and kept clean by an N<sub>2</sub> flow. | |||
* Standby temperature: 700 <sup>o</sup>C | *Standby temperature: 700 <sup>o</sup>C | ||
* N<sub>2</sub> flow: 3 SLM | *N<sub>2</sub> flow: 3 SLM | ||
* O<sub>2</sub> flow: 0 SLM | *O<sub>2</sub> flow: 0 SLM | ||
The user has to press "Start" (on the touch screen or furnace computer) to start the recipe. | The user has to press "Start" (on the touch screen or furnace computer) to start the recipe. | ||
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''Message: "Oxidation"'' | ''Message: "Oxidation"'' | ||
The dry oxidation is started by flowing O<sub>2</sub through the furnace instead of N<sub>2</sub. | The dry oxidation is started by flowing O<sub>2</sub> through the furnace instead of N<sub>2</sub. | ||
O<sub>2</sub> flow: 5 SLM | *O<sub>2</sub> flow: 5 SLM | ||
N<sub>2</sub> flow: 0 SLM | *N<sub>2</sub> flow: 0 SLM | ||
The oxidation time is a variable command, so it can be set by the user. | The oxidation time is a variable command, so it can be set by the user. | ||
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The wafers are annealed in N<sub>2</sub> at the same temperature as the oxidation temperature. The annealing will improve the oxide quality by making it more dense. | The wafers are annealed in N<sub>2</sub> at the same temperature as the oxidation temperature. The annealing will improve the oxide quality by making it more dense. | ||
N<sub>2</sub> flow: 6 SLM | *N<sub>2</sub> flow: 6 SLM | ||
O<sub>2</sub> flow: 0 SLM | *O<sub>2</sub> flow: 0 SLM | ||
Normally the annealing time is 20 minutes, but it is a variable command, so it can be set by the user. | Normally the annealing time is 20 minutes, but it is a variable command, so it can be set by the user. | ||