Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
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| Cl<sub>2</sub> | | Cl<sub>2</sub> | ||
| HBr | | HBr | ||
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N<sub>2</sub> | |||
|} | |} | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||