Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions
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The recipes for dry oxidation are very similar on these furnaces. | The recipes for dry oxidation are very similar on these furnaces. | ||
The oxidation and annealing times | The oxidation and annealing times are variable commands. It means that these can be changed by the users. The maximum allowed oxidation time is ... | ||
The oxidation temperatures are fixed in the recipes. The temperature can be seen in the recipe name, e.g. "DRY1000" for dry oxidation at 1000 C. | |||
===Steps in the dry oxidation recipes=== | ===Steps in the dry oxidation recipes=== | ||
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The user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace | The user has to press "Start" (on the touch screen) or "Continue" (on the furnace computer) to close the furnace | ||
*CLOSE | |||
Message: "Boat moving" | |||
The furnace is closing | |||
*HEAT UP | |||
Message: "Heat-up" | |||
The furnace is heating up to the temperature defined in the recipe | |||
The recipe will continue to the next step, when the temperature of center heating zone (zone 2) reached the right temperature | |||
*OXIDATION | |||
Message: "Dry oxidation" | |||
The dry oxidation is started | |||
O2 flow: 5 SLM | |||
N2 flow: 0 SLM | |||
The oxidation time has been defined by the user. The oxidation time can be changed, until the oxidation step is started. | |||
*ANNEAL | |||
Message: "Anneals/Dens" | |||
The standard annealing time is 20 minutes, but users can change the time. The annealing time can be changed, until the annealing step is started. | |||