LabAdviser/Courses: Difference between revisions
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We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility. | We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility. | ||
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![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Method 1]] | |||
![[Specific Process Knowledge/Thin film deposition/PECVD|Method 2]] | |||
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!Generel description | |||
|Generel description - method 1 | |||
|Generel description - method 2 | |||
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!Parameter 1 | |||
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*B | |||
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*B | |||
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!Parameter 2 | |||
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*C | |||
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!Substrate size | |||
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*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
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*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
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!'''Allowed materials''' | |||
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*Allowed material 1 | |||
*Allowed material 2 | |||
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*Allowed material 1 | |||
*Allowed material 2 | |||
*Allowed material 3 | |||
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==The Cleanroom Introduction Course== | ==The Cleanroom Introduction Course== | ||