Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch using HF: Difference between revisions
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The etch rates: | The etch rates: | ||
<ul> | <ul> | ||
<li> 5% HF | <li> 5% HF <p>→</p> <b>1.74 nm/s</b> </li> | ||
<li> 1vol. H<sub>2</sub>O : 1vol. 5% HF <b>1.05 nm/s</b> </li> | <li> 1vol. H<sub>2</sub>O : 1vol. 5% HF <b>1.05 nm/s</b> </li> | ||
<li> 2vol. H<sub>2</sub>O : 1vol. 5% HF <b>0.72 nm/s</b> </li> | <li> 2vol. H<sub>2</sub>O : 1vol. 5% HF <b>0.72 nm/s</b> </li> | ||