Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch using HF: Difference between revisions
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Be aware of that the 5% HF etches quite fast | Be aware of that the 5% HF etches quite fast. Actually, so fast that it can be tricky to control. Taking the sample out of the solution and placing it in a bigger water container to rinse, resulting a time delay due to the movement and the etch continues. It means the handling things around the fumehood can be a source of errors in this case. | ||
''Evgeniy Shkondin, DTU Nanolab, June 2019'' | ''Evgeniy Shkondin, DTU Nanolab, June 2019'' | ||