Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch using HF: Difference between revisions
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The etch rates: | The etch rates: | ||
<ol > | <ol type="a"> | ||
<li>5% HF: 1.74 nm/s</li> | <li>5% HF: 1.74 nm/s</li> | ||
*'''1vol. H<sub>2</sub>O : 1vol. 5% HF 1.05 nm/s''' | *'''1vol. H<sub>2</sub>O : 1vol. 5% HF 1.05 nm/s''' | ||