Jump to content

Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

Kabi (talk | contribs)
Kabi (talk | contribs)
Line 27: Line 27:
It can produce features down to ~10µm size over a large area. It can scan over an area of up to ~15x15cm without moving the sample. By moving the sample on the large x-y-stage this area can be extended by stitching.
It can produce features down to ~10µm size over a large area. It can scan over an area of up to ~15x15cm without moving the sample. By moving the sample on the large x-y-stage this area can be extended by stitching.


The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[Specific_Process_Knowledge/Pattern_Design_and_Mask_Fabrication| here]].
The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[Specific_Process_Knowledge/Pattern_Design| here]].


== Technical specifications ==
== Technical specifications ==