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Specific Process Knowledge/Thermal Process/C2 Furnace III-V oxidation: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
912 edits
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*[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_oxidation_furnace_(C2)|Standard wet oxidation recipe on the III-V oxidation furnace]]
*[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_oxidation_furnace_(C2)|Standard wet oxidation recipe on the III-V oxidation furnace]]


==Overview of the performance of the III-V Oven and some process related parameters==
==Overview of the performance of the III-V oxidation furnace and some process related parameters==




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*Wet oxidation of III-V dvices
*Wet oxidation of III-V devices
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!style="background:silver; color:black" align="center"|Performance
!style="background:silver; color:black" align="center"|Performance
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