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| ==Overview of the performance of the Four-Point Probe at DTU Nanolab== | | ==Overview of the performance of the Four-Point Probe at DTU Nanolab== |
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| !style="background:silver; color:black;" align="center"|Equipment
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| |style="background:WhiteSmoke; color:black"|'''Four point probe - Jandel'''
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| |style="background:WhiteSmoke; color:black"| '''Four point probe - Veeco'''
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| !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose
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| |style="background:WhiteSmoke; color:black"|Measure voltage, sheet resistance or volume resistivity at varied current
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| |style="background:WhiteSmoke; color:black"|Measure resistance, resistivity or film thickness(*) at 100uA
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| |style="background:WhiteSmoke; color:black"|
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| |style="background:WhiteSmoke; color:black"|(*) Knowing resistivity
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| !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates
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| |style="background:WhiteSmoke; color:black"|Small chips up to 8inch wafer
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| |style="background:WhiteSmoke; color:black"|4inch wafer or 6inch wafer
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| |}
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| {| border="1" cellspacing="0" cellpadding="4" | | {| border="1" cellspacing="0" cellpadding="4" |
