Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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|Unit | |Unit | ||
| | |mV, ohm/square, ohm.cm(wafer), ohm.cm(volume) | ||
| | |ohm/square, ohm.cm, nm | ||
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| Line 100: | Line 100: | ||
|- | |- | ||
|Unit | |Unit | ||
| | |mV, ohm/square, ohm.cm(wafer), ohm.cm(volume) | ||
| | |ohm/square, ohm.cm, nm | ||
|- | |- | ||