Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
| Line 106: | Line 106: | ||
|Substrate | |Substrate | ||
|Small pieces up to 200mm wafer | |Small pieces up to 200mm wafer | ||
| | |Only 4inch or 6inch wafer | ||
|- | |- | ||
|} | |} | ||
| Line 106: | Line 106: | ||
|Substrate | |Substrate | ||
|Small pieces up to 200mm wafer | |Small pieces up to 200mm wafer | ||
| | |Only 4inch or 6inch wafer | ||
|- | |- | ||
|} | |} | ||