Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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|style="background:WhiteSmoke; color:black"|'''Four point probe - Jandel''' | |||
|style="background:WhiteSmoke; color:black"| '''Four point probe - Veeco''' | |||
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|Purpose | |||
|Substrate | |||
| | |||
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| Power | |||
|130W | |||
|170W | |||
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| Sputter pressure | |||
| 5*10<sup>-3</sup> mbar | |||
| 1*10<sup>-2</sup> mbar | |||
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| Rate | |||
| About 0.7 Å/s | |||
| About 0.6 Å/s | |||
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