Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec: Difference between revisions

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 '''Parameters'''
-Listed below are tried parameters, that can be used during deposition. Use the rates as a start value, and make a test to be sure that you get the right thickness.
+Listed below are tried parameters, that can be used during deposition. The process parameters in the table below can be used as started values, run a test process to be sure that you get the right thickness.
-Please don´t use higher power then 180W, since the target then could break into a lot of small pieces.
+'''Please don´t use higher power than 180W''', since the target then could break into a lot of small pieces.
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