Specific Process Knowledge/Thermal Process/C2 Furnace III-V oxidation: Difference between revisions
| Line 15: | Line 15: | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=88 III-V Oxidation (C2)]''' | ||
==Process knowledge== | ==Process knowledge== | ||