Specific Process Knowledge/Thermal Process/C2 Furnace III-V oxidation: Difference between revisions
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==Process knowledge== | ==Process knowledge== | ||
*[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III- | *[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_oxidation_furnace_(C2)|Standard wet oxidation recipe on the III-V oxidation furnace]] | ||
==Overview of the performance of the III-V Oven and some process related parameters== | ==Overview of the performance of the III-V Oven and some process related parameters== | ||