Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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Multiposition Probe stand can measure on wafers up to 200mm diameter. The Θ movement clicks in four positions at 90 degrees and the linear movement in up to 10 positions giving repeat placement accuracy of +/- 1mm. | Multiposition Probe stand can measure on wafers up to 200mm diameter. The Θ movement clicks in four positions at 90 degrees and the linear movement in up to 10 positions giving repeat placement accuracy of +/- 1mm. | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | |||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=169 Four point probe]''' | |||
==Four-Point Probe from Veeco== | ==Four-Point Probe from Veeco== | ||