Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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==Four-Point Probe from Veeco== | ==Four-Point Probe from Veeco== | ||
'''The Four-Point Probe is a Veeco FPP-5000'''. The main purpose is to measure film resistance and resistivity on a 4" or 6" wafer. And it can also be used to find film thickness as knowing film resistivity. [[Image:4pointprobe.jpg|thumb|300x300px|Four point probe | '''The Four-Point Probe is a Veeco FPP-5000'''. The main purpose is to measure film resistance and resistivity on a 4" or 6" wafer. And it can also be used to find film thickness as knowing film resistivity. [[Image:4pointprobe.jpg|thumb|300x300px|Four point probe - Veeco]] | ||
Only 4inch or 6inch wafers can be fitted in the system because a special holder is needed. | Only 4inch or 6inch wafers can be fitted in the system because a special holder is needed. | ||