Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose | ||
|style="background:WhiteSmoke; color:black"|Measure voltage, sheet resistance or volume resistivity | |style="background:WhiteSmoke; color:black"|Measure voltage, sheet resistance or volume resistivity at varied current | ||
|style="background:WhiteSmoke; color:black"|Measure resistance, resistivity or film thickness(*) | |style="background:WhiteSmoke; color:black"|Measure resistance, resistivity or film thickness(*) at 100uA | ||
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