Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Purpose | ||
|style="background:WhiteSmoke; color:black"|Measure voltage, sheet resistance or volume resistivity | |style="background:WhiteSmoke; color:black"|Measure voltage, sheet resistance or volume resistivity | ||
|style="background:WhiteSmoke; color:black"|Measure resistance, resistivity or film thickness* | |style="background:WhiteSmoke; color:black"|Measure resistance, resistivity or film thickness(*) | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
|style="background:WhiteSmoke; color:black"|*Knowing resistivity | |style="background:WhiteSmoke; color:black"|(*) Knowing resistivity | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||