Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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==Four-Point Probe from Veeco== | ==Four-Point Probe from Veeco== | ||
'''The Four-Point Probe is a Veeco FPP-5000'''. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers | '''The Four-Point Probe is a Veeco FPP-5000'''. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers if is a N- or P-type wafer. [[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in 346-904]] | ||
It works only for 4inch or 6inch wafers because a special holder is needed. | It works only for 4inch or 6inch wafers because a special holder is needed. | ||