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Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions

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[[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]]
[[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]]
'''The Four point probe is manufactured by Jandel Engineering Limited''' and using Jandel probe head, a cylindrical probe type B: 1.00 mm spacing, 100 micron tip radius, 100g load linear is being use at Nanolab and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV. The unit supplies a constant current and can display the resultant voltage, sheet resistance or volume resistivity depending which function has been chosen. For calculation of volume resistivity (for wafers or bulk samples) it is possible to input wafer thickness or probe spacing as required.  
'''The Four point probe is manufactured by Jandel Engineering Limited''' and using Jandel probe head, a cylindrical probe type B: 1.00 mm spacing, 100 micron tip radius, 100g load linear is being use at Nanolab and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV. The unit supplies a constant current and can display the resultant voltage, sheet resistance or volume resistivity depending which function has been chosen. For calculation of volume resistivity (for wafers or bulk samples) it is possible to input wafer thickness or probe spacing as required.  
There is an Autorange feature: it will begin at 10 nA and increase the current by a factor of 10 until suitable level of measuring voltage is made and then it will stop and show the voltage or ohm/square on the display.


For sheet resistance measurements, the quoted range is 1 milliohm/square to 5x108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy.  
For sheet resistance measurements, the quoted range is 1 milliohm/square to 5x108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy.  
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