Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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There are two four point probes at Nanolab. Four point probe from Jandel is located inside the cleanroom(D-3) and Four-Point Probe from Veeco is now located in the basement(346-904). | There are two four point probes at Nanolab. Four point probe from Jandel is located inside the cleanroom(D-3) and Four-Point Probe from Veeco is now located in the basement(346-904). | ||
==Four-Point Probe from Jandel== | |||
[[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]] | [[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]] | ||
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==Four-Point Probe from Veeco== | |||
The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer. [[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in 346-904]] | |||
It works only for 4" wafers because a special holder is need. | |||
'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||