Specific Process Knowledge/Characterization/Four-Point Probe: Difference between revisions
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There are two four point probes at Nanolab. Four point probe from Jandel is located inside the cleanroom(D-3) and Four-Point Probe from Veeco is now located in the basement(346-904). | There are two four point probes at Nanolab. Four point probe from Jandel is located inside the cleanroom(D-3) and Four-Point Probe from Veeco is now located in the basement(346-904). | ||
[[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]] | [[Image:Jandel_four_point_probe.PNG |thumb|400x400px|Four point probe: positioned in cleanroom D-3]] | ||
The Four point probe is manufactured by Jandel Engineering Limited and using Jandel probe head and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV. | '''The Four point probe is manufactured by Jandel Engineering Limited''' and using Jandel probe head and the RM3000+ Test Unit which can supply constant current between 10nA and 99.99mA, and measure voltage from 0.01mV to 1250mV. | ||
For sheet resistance measurements, the quoted range is 1 milliohm/square to 5x108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy. | For sheet resistance measurements, the quoted range is 1 milliohm/square to 5x108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy. | ||