Specific Process Knowledge/Lithography/4562: Difference between revisions
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'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/MiR click here]''' | '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/MiR click here]''' | ||
AZ 4562 is a positive UV photoresist for thick coatings (5µm | AZ 4562 is a positive UV photoresist for thick coatings (above 5µm). | ||
==Priming== | ==Priming== | ||