Specific Process Knowledge/Lithography/4562: Difference between revisions

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	==Development==		==Development==

	The recommended development speed for AZ 4562 is 2µm/min. A		The recommended development speed for AZ 4562 is 2µm/min. A 6.2µm resist film thus requires 3min development, usually as three 60s puddles of TMAH (AZ 726 MIF). 10µm AZ 4562 has successfully been developed using 4x60s development