Specific Process Knowledge/Lithography/nLOF: Difference between revisions
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[[Image:nLOFspincurves.JPG|500x500px|thumb|Spin curves for AZ nLOF 2020 using a 30s spin-off, and a 60s@110°C softbake]] | [[Image:nLOFspincurves.JPG|500x500px|thumb|Spin curves for AZ nLOF 2020 using a 30s spin-off, and a 60s@110°C softbake]] | ||
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==Post-exposure bake== | ==Post-exposure bake== | ||