Specific Process Knowledge/Pattern Design: Difference between revisions
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== Mask Fabrication for UV-lithography == | == Mask Fabrication for UV-lithography == | ||
=== Tips and tricks for mask designing === | |||
You can find a | You can find a | ||
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=== How to order a mask=== | === How to order a mask=== | ||
Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature sized can be 0.8µm, 1µm or 1.5µm which is reflected in the price. | Our standard mask supplier is [http://Compugraphics.com/ Compugraphics]. They can provide 5" and 7" masks on soda lime glass or quartz. Minimum feature sized can be 0.8µm, 1µm or 1.5µm which is reflected in the price. | ||