Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
| Line 33: | Line 33: | ||
Oxidation: | Oxidation: | ||
*Dry | *Dry | ||
*Wet (with bubbler. | *Wet (with bubbler. Water steam + N<sub>2</sub>) | ||
Annealing: | Annealing: | ||
*N<sub>2</sub> | *N<sub>2</sub> | ||