Specific Process Knowledge/Thin film deposition/Deposition of ZnO: Difference between revisions

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	ZnO can be deposited by Sputtering process and atomic layer deposition (ALD). In the chart below ~~your~~ can compare the different deposition equipment.		ZnO can be deposited by Sputtering process and atomic layer deposition (ALD). In the chart below you can compare the different deposition equipment.