Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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[[Image:MLA150_BSA_Backside.JPG|300x300px|thumb|Image of a BSA alignment mark during alignment. The mark is 300µm wide. The blue cross-hair is ~18µm. ]] | [[Image:MLA150_BSA_Backside.JPG|300x300px|thumb|Image of a BSA alignment mark during alignment. The mark is 300µm wide. The blue cross-hair is ~18µm. ]] | ||
'''Overlay accuracy ( | '''Overlay accuracy (spec):''' 1.0µm | ||
'''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5mm from the center. | '''BSA windows:''' along the X and Y axes, 10mm x 46mm, starting 14.5mm from the center. | ||